Adaptive patterning for panelized packaging

ABSTRACT

An adaptive patterning method and system for fabricating panel based package structures is described. Misalignment for individual device units in a panel or reticulated wafer may be adjusted for by measuring the position of each individual device unit and forming a unit-specific pattern over each of the respective device units.

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.61/305,125, filed Feb. 16, 2010.

TECHNICAL FIELD

Embodiments of the present invention relate to the field of panelizedpackaging.

BACKGROUND

A common implementation of panelized packaging gaining acceptance inindustry is fan-out wafer level packaging (WLP) in which multiple dieunits are placed face down on a temporary tape carrier. The carrier isovermolded with epoxy molding compound using a compression moldingprocess. After molding the carrier tape is removed, leaving the activesurface of the multiple die exposed in a structure commonly referred toas a reconstituted wafer. Subsequently, a wafer level chip scale package(WLCSP) build-up structure is formed on top of the reconstituted wafer.Ball grid array (BGA) balls are attached to the reconstituted wafer andthen the reconstituted wafer is saw singulated to form individualpackages. It has been observed that the die placement and overmoldingprocesses may cause displacement and/or rotation of the die, resultingin defective packages and yield loss.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a top view of a reconstituted wafer in accordancewith an embodiment of the present invention.

FIGS. 1B-1D illustrate a top view of a plurality of packages or modulesarranged in a reconstituted wafer in accordance with embodiments of thepresent invention.

FIG. 2A illustrates a top view of a fan-out WLP in accordance with anembodiment of the present invention.

FIG. 2B illustrates a cross-sectional side view of a fan-out WLP inaccordance with an embodiment of the present invention.

FIG. 3A illustrates a top view of the actual position of a package diehaving a different x-y position than that of the nominal, referenceposition in accordance with an embodiment of the present invention.

FIG. 3B illustrates a top view of the actual position of a package diehaving a different orientation than that of the nominal, referenceorientation in accordance with an embodiment of the present invention.

FIG. 4 illustrates an RDL pattern in accordance with an embodiment ofthe present invention.

FIG. 5A illustrates a portion of panel design in accordance with anembodiment of the present invention.

FIG. 5B illustrates a misaligned die unit in accordance with anembodiment of the present invention.

FIG. 6 illustrates a discrete plurality of different design options inaccordance with an embodiment of the present invention.

FIG. 7 illustrates an adaptive patterning system in accordance with anembodiment of the present invention.

DETAILED DESCRIPTION

Embodiments of the present invention disclose methods and systems toimprove panelized packaging. In accordance with embodiments of thepresent invention, misalignment for individual device units in a panelor reticulated wafer may be adjusted for by measuring the misalignmentfor each individual device unit and adjusting the position or design ofa feature in the build-up layer for each respective device unitutilizing a mask-less patterning technique.

In the following description, numerous specific details are set forth,such as specific configurations, compositions, and processes, etc., inorder to provide a thorough understanding of the present invention. Inother instances, well-known processes and manufacturing techniques havenot been described in particular detail in order to not unnecessarilyobscure the present invention. Furthermore, it is to be understood thatthe various embodiments shown in the Figures are illustrativerepresentations and are not necessarily drawn to scale.

The terms “over,” “between,” and “on” as used herein refer to a relativeposition of one layer with respect to other layers. One layer depositedor disposed above or under another layer may be directly in contact withthe other layer or may have one or more intervening layers. One layerdeposited or disposed between layers may be directly in contact with thelayers or may have one or more intervening layers. In contrast, a firstlayer “on” a second layer is in contact with that second layer.

In accordance with embodiments of the present invention, a plurality ofdevice units may be assembled and molded to create a panel, orreticulated wafer. Device units may be active device units such as dies,and may also be passive device units such as an integrated passivenetwork, or a discrete passive device unit such as a capacitor,resistor, or inductor. The device units may be pre-packaged, thoughpre-packaging is not required. In accordance with embodiments of thepresent invention, the pre-packages may contain single or a plurality ofdevice units and other components. The panel is inspected to measure thetrue position for each device unit in the panel. For example, themeasured position may include an x-y position and/or orientation of atleast one feature from each device unit with respect to a globalfiducial(s) on the panel. A unit-specific pattern for each individualdevice unit is then created based upon the measured position for eachrespective individual device unit, and provided to a laser, direct writeimaging system or other mask-less patterning system. The unit-specificpatterns are then formed over each of the plurality of device units sothat each unit-specific pattern is aligned with the respective deviceunit.

In an embodiment, creating the pattern relates to adjusting the positionor design of a unit detail pattern in a chip scale package (CSP)build-up structure to align with the measured position of each deviceunit in the panel. In an embodiment, the unit detail pattern is a firstvia pattern, a capture pad, or an interconnecting trace pattern whichmay or may not be associated with a redistribution layer (RDL). Forexample, the position of a first via pattern can be adjusted so that itis formed in alignment with the measured position of each device unit inthe panel. Also, an RDL layer, including at least a capture pad for thefirst via may be adjusted or designed to maintain alignment with thetrue position of each device unit in the panel. The final under bumpmetallurgy (UBM) pad and BGA ball may be formed without aligning withrespect to the measured position of the device unit. As such, the UBMpad and BGA ball may be aligned consistently with respect to the packageoutline for each device unit, maintaining conformance to the packageoutline.

Adaptive patterning may also be utilized to create a plurality ofmodule-specific patterns across the panel. In accordance withembodiments of the present invention, a plurality of device units andoptionally other components may be assembled and molded to create apanel, or reticulated wafer. The other components may be opticalelements, connectors (e.g. to connect to the outside of the module) andother electronic components, which may also be pre-packaged. In anembodiment, a module includes a plurality of device units. A module mayalso include at least one device unit and another component. A panelincluding a plurality of arrangements of a plurality of device units, orat least one device unit and at least one additional component isinspected to measure the true position for each device unit and optionalother component in the panel. For example, the measured position mayinclude an x-y position and/or orientation of at least one feature fromeach device unit and optional other component within a module withrespect to a global fiducial(s) on the panel. A module-specific patternfor each module is then created based upon the measured position foreach respective individual device unit and optional other componentwithin the respective module, and provided to a laser, direct writeimaging system or other mask-less patterning system. The module-specificpatterns are then formed over each of the plurality of device units andoptional other components so that each module-specific pattern isaligned with the respective module device units and optional othercomponents.

Creating the module-specific pattern may relate to adjusting theposition or design of a unit or component detail pattern in a CSPbuild-up structure to align with the measured position of each deviceunit or component in the panel as previously described with regard tothe single device unit package embodiment. Where multiple devices andoptional other components exist, device interconnect traces which may ormay not be associated with a RDL may exist. A multi-layer build-upstructure can also be utilized for both modules as well as single devicepackages.

Referring to FIG. 1A, in an embodiment, the process begins with a panel102 including a plurality of device units 104 overmolded with anencapsulating material 106 such as an epoxy resin. While FIG. 1Aillustrates a circular panel 102, alternative panel formats such asrectangular or square may be utilized. As illustrated in FIG. 1A, theactive surfaces of the plurality of device units 104 are substantiallyflush with the encapsulating material 106. In an embodiment, panel 102may be what is known in the art as a reconstituted wafer formed in a WLPtechnique where the plurality of device units are placed face down on atemporary tape carrier, followed by overmolding with epoxy moldingcompound using a compression molding process, followed by removal of thetemporary tape carrier leaving the active surfaces of the plurality ofdie units exposed.

Subsequently, a build-up structure may be formed on top of the structureillustrated in FIG. 1A and the device units are singulated to formpackages or modules. For example, as illustrated in FIG. 1B, the panelmay be singulated into a plurality of single-die packages 150, eachpackage including a single semiconductor die unit 152. Referring to FIG.1C, a plurality of die units 152, 154 may be mounted within the moldedpanel and singulated to form multi-die packages or modules 150.Referring to FIG. 1D, a single die unit 152 or a plurality of die units152, 154 may be mounted within the molded panel with the addition of apassive device(s) 156 (such as capacitor, inductor or resistor) and/orother component(s) 158 (such as an optical element, connector or otherelectronic component) and singluated to form a packages or modules 150which include both an active device(s) and a passive device(s) and/orother component 158. A variety of combinations of active and passivedevices and optionally other components within packages or modules areenvisioned in accordance with embodiments of the present invention.Accordingly, the particular configurations illustrated in FIGS. 1B-1Dare meant to be illustrated rather than limiting.

In the following discussion, certain embodiments are described withregard to the formation of a single die fan-out WLCSP, thoughembodiments of the invention are not limited to such. Embodiments of thepresent invention may be used in any panelized packaging applicationincluding single-die applications, multi-die modules, some combinationof a die(s) and a passive component(s) within a module, or somecombination of a device unit(s) and another component(s) within amodule. In one aspect, embodiments of the present invention mayeliminate or reduce package or module assembly yield loss caused bymisalignment of the device unit or other component during panelization.In another aspect, embodiments of the present invention may maintaincompliance to the package or module outline and not require changes tothe position of UBM pads or BGA balls. Maintaining compliance with thepackage or module outline can be consistently achieved in the finalproduct, e.g. as end-product package, test socket, etc. In anotheraspect, embodiments of the present invention may allow for a smallerbond pad opening on the device units.

Referring now to FIGS. 2A-2B, ball grid array (BGA) balls 108 areattached and the panel is saw singulated to form individual packages.The CSP build-up structure 110 may be formed over the active surface ofeach individual die unit before singulation. While build-up structure110 in FIG. 2B is illustrated as including a single dielectric layer115, it is understood that multiple layers may be used to form build-upstructure 110. Build-up structure 110 may be formed from a dielectricmaterial 115 within which is included a first via 112 which is inelectrical contact with a bond pad 105 of the die unit 152. Aredistribution layer (RDL) 114 is formed which may span under the bondpad 105, first via 112, and over an underbump metallurgy (UBM) via 116,UBM pad 119, and BGA ball 108. BGA ball 108 is illustrated in FIG. 2B asa solder ball, though is not limited to such. In other embodiments,multiple dielectric layers and device interconnect traces, which may ormay not be associated with the RDL, are formed in accordance with theprinciples described herein. Such multi-layer build-up structures can beutilized in both single-die package applications as well as multi-devicemodules.

It has been observed that die unit placement and overmolding may causedisplacement and/or rotation of the orientation of any of the pluralityof die units 152 on the temporary tape carrier. This may be attributedto the die units not being rigidly attached to the temporary tapecarrier as well as shrinkage of the molding compound during curing ofthe molding compound. As a result, the plurality of die units 152 onpanel 102 may not lie in their nominal, reference positions aftercompression molding. As illustrated in FIG. 3A, the actual position of adie unit 152 may have a different x-y position than that of the nominal,reference position 152′ of the die unit. As illustrated in FIG. 3B, theactual position of the die unit 152 may be rotated such that it has adifferent orientation θ than that of the nominal, reference orientationθ′ of the nominal, reference position 152′. While the difference in x-yposition and orientation is illustrated in FIGS. 3A-3B with respect tothe nominal, reference positions of the die unit within an individualsingulated package outline, it is understood that the difference in x-yposition and orientation may be actually measured with regard to aglobal fiducial(s) within the panel or reticulated wafer.

Misalignment of the individual die units may cause some of the packageswhich are subsequently singulated from the panel to be defective.Conventional methods for forming a CSP build-up structure on a panelutilize mask-based patterning technologies to expose a pattern onmultiple die units of the panel at the same time. The masks includefixed patterns for die pad to UBM interconnect and, therefore, lack theability to adjust for the movement of each die within a panelizedformat. The impact of the conventional methods is either yield loss dueto misalignment of first vias to the bond pads or the addition of someintermediate form of die pad re-routing in native wafer form (prior topanelization) to make larger die pads as targets to ensure the firstvias make connection despite die movement. As a result, conventionalprocessing technology requires that bond pads on the die units be largerthan necessary to avoid yield loss from the panel, thereby reducing theapplication space for WLP technology.

In accordance with embodiments of the present invention, misalignment ofthe individual die units is adjusted for by utilizing an adaptivepatterning technique which additionally implements mask-less lithographyto pattern features of the build-up structure 110. Laser ablation anddirect write exposure are examples of suitable mask-less patterningtechniques in accordance with embodiments of the present invention.

In an embodiment, a panel including a plurality of die units is providedas illustrated in FIG. 1A. A true position is measured for each of theplurality of die units 152 of the panel. The measurement may be of aspecific feature formed on each of the die units of the panel. Forexample, the position of at least one bond pad 105 on each of theplurality of die units on the panel can be measured. The specificposition can be a variety of positions, such as a corner of the bond pad105, a center of the bond pad, an outline of the bond pad, etc. Includedin the position measurement may be the x-y position and/or orientationwith respect to a global fiducial(s) on the panel. Any suitableinspection tool may be utilized to measure the true first position, suchas an optical inspection tool. In an embodiment, a single feature ismeasured to obtain an x-y position of a die unit. In an embodiment, aplurality of features are measured to obtain an orientation of a dieunit.

A build-up structure 110 is formed over the panel including theplurality of die units. Referring again to FIG. 2B, a singulated packageis illustrated with a completed build-up structure 110. While thebuild-up structure 110 is illustrated as being formed over a singlepackage in FIG. 2B, it is understood that build-up structure 110 isformed prior to singulation, and that a plurality of build-up structures110 are formed across the panel 102 and over each of the respectiveplurality of die units 152 on the panel 102 illustrated in FIG. 1A.

In an embodiment, the build-up structure 110 is formed from a dielectricmaterial 115, from which features are patterned. Build-up structure 110may include a plurality of layers. For example, a separate dielectriclayer may be formed in which the first via 112, RDL pattern 114, and UBMvia 116, and/or UBM pad 119 are separately formed. In an embodiment,there may be multiple via and RDL patterned layers. Dielectric material115 may be opaque or translucent, and different materials can beutilized for the separate dielectric layers. Where the dielectricmaterial 115 is opaque, optical measurements of a feature may bemeasured prior to forming the dielectric material 115 over theunderlying feature. Where the dielectric material 115 is translucent itis possible to measure the position of a feature below the dielectricmaterial 115 before or after forming the dielectric material over thepanel.

Based upon the true measured position for each of the respective dieunits, a specific pattern is created for each of the plurality of dieunits. The pattern is unit-specific for each of the respective dieunits, and therefore the unit-specific patterns may be different (e.g.x-y position, orientation, design) for each respective die unit so thateach unit-specific pattern is aligned with each respective die unit,thereby compensating for misalignment of the individual die units. Eachunit-specific pattern may be a common pattern aligned with therespective die unit. Each unit-specific pattern may also be uniquelycreated for each die unit in accordance with embodiments of the presentinvention.

The pattern is then formed over each of the plurality of die units. Inan embodiment, the pattern is a unit detail pattern formed in a build-upstructure 110 such as the first via 112 which connects the bond pad 105to the RDL pattern 114, the RDL pattern 114, or the UBM pad pattern 119.As illustrated in FIG. 4, the RDL pattern 114 of FIG. 2B may include afirst via capture pad 118 aligned with the first via 112, a UBM viacapture pad 120 aligned with the UBM via 116, and a trace portion 122connecting the capture pads 121, 120. The patterned features in thebuild-up structure 110 may be formed utilizing a mask-less patterningsystem. For example, a first via 112 or RDL pattern 114 may be createdthrough exposure of a photoimagable polymer or photoresist through adirect writing. First via 112 or RDL pattern 114 may also be createdthrough laser ablation of dielectric material 115.

A number of methods are envisioned for creating a pattern for each ofthe plurality of die units based upon the measured position for each ofthe respective die units. In an embodiment, this may be accomplished bycomparing the measured position of each of the plurality of die units toa number of defined nominal, reference positions. For example, anominal, reference position of at least one feature on each of theplurality of die units can be defined with respect to a globalfiducial(s) on the panel 102. The specific nominal, reference positioncan be a variety of positions, such as a corner of the bond pad 105, acenter of the bond pad, an outline of the bond pad, an alignmentfeature, etc. The specific nominal, reference position can also be thepackage outline, within which the die units will be packaged. Multiplefeatures for each unit may be used in order to determine the orientationof the die within the unit. Included in the nominal, reference positionmay be the x-y position and/or orientation with respect to a globalfiducial(s) on the panel. In an embodiment, defining a nominal,reference position includes generating an electronic panel map. Forexample, the nominal, reference position (x-y position and/ororientation) of each die unit in the panel can be defined in anelectronic panel map. Though embodiments do not require a panel map, andthe nominal, reference positions can be provided elsewhere.

In an embodiment, the position or design of the pattern is adjusted foreach die unit to align with the measured position of the respective dieunit in the panel. Design software can create a pattern design for eachof the plurality of die units based upon the measured position of eachof the die units in the panel. This pattern design may then be stored ina panel design file, in which the x-y position and/or orientation of thepattern is adjusted. The pattern may also be changed to optimize thepattern design for each die unit. The panel design file may betransferred to a mask-less patterning system to form at least theunit-specific pattern.

FIG. 5A illustrates a portion of a panel design in accordance with anembodiment of the present invention. The illustration provided in FIG.5A is meant to be exemplary of a panel design in accordance with anembodiment of the present invention and is not meant to be limiting. Asillustrated, an upper left-hand corner of an individual package outlineis shown, however it is understood that the panel design may includeadditional or less information for the individual die package, and thatthe panel design may include similar information for each of theplurality of die units of the panel.

As illustrated in FIG. 5A, the panel design may define nominal,reference positions for each die within the panel, as well as nominal,reference positions for yet to be formed features. In an embodiment, thenominal, reference positions for the die 152′ and bond pad 105′ aredefined. Features which have not yet been formed over the panel mayinclude nominal, reference positions for the first via 112′, die viacapture pad 118′, UBM via 116′, UBM via capture pad 120′, RDL patterntrace 122′, UBM pad 119′, and package outline 130′ of a package to besingulated from the panel.

FIG. 5B illustrates a misaligned die unit in accordance with anembodiment of the present invention. As illustrated, die unit 152 isillustrated as being misaligned with respect to the nominal, referencedie unit position 152′ or global fiducial(s) on the panel (notillustrated). Likewise, the already formed die pad 105 is illustrated asbeing misaligned with respect to the nominal, reference die unitposition 105′ or global fiducial(s) on the panel (not illustrated).

In an embodiment, a nominal, reference position of at least one featureon each of the plurality of die units is defined. For example, thenominal, reference position may be die pad 105′. The true position ofthe die bond pad 105 is measured for each of the plurality of die unitson the panel. In accordance with embodiments of the invention,misalignment of the individual die units is determined when the measuredposition of the die bond pad 105 has a different x-y position ororientation than that of the reference position of the die bond pad105′.

In an embodiment, the position of the patterned feature (e.g. first via112, die via capture pad 118, UBM via 116, UBM via capture pad 120, RDLpattern trace 122) formed in the CSP build-up structure 110 has adifferent x-y position or orientation than the nominal, referenceposition of the feature for at least one of the plurality of die units.In an embodiment, the formed first via 112 has a different x-y positionas compared to the reference position of the first via 112′ for at leastone of the plurality of die units. In an embodiment, the formed RDLpattern 114 has a different x-y position as compared to the referenceposition of the RDL pattern 114′ for at least one of the plurality ofdie units. In an embodiment, the formed RDL pattern 114 has a differentx-y position and orientation as compared to the reference position ofthe RDL pattern 114′ for at least one of the plurality of die units.

In an embodiment, the amount of misalignment of the die unit in the x-ydirection and/or orientation is measured by the inspection tool, and adelta-value between the nominal, reference position and measuredposition of the die unit is calculated for at least one of the pluralityof die units. Based upon the delta-value, the pattern to be formed iscreated by adjusting the pattern from its reference position by the samedelta-value. It is contemplated, however, that the patterned feature maynot necessarily have to be formed with the same delta-value inaccordance with embodiments of the invention.

Other embodiments of the present invention may maintain the relativealignment of certain features within the end package. In the embodimentillustrated in FIG. 5B, it is shown that the relative alignment betweenthe first via 112, and the bond pad 105 and die unit 152 is the same asthe relative alignment illustrated in FIG. 5A between the nominal,reference positions 112′, 105′, 152′. In an embodiment, any of theportions 118, 122, 120 of the RDL pattern 114, or the entire RDL pattern114 may be shifted in FIG. 5B by the same delta-value between the truefirst position of the bond pad 105 and the reference bond pad position105′.

In an embodiment, an additional feature may be formed over each of theplurality of die units without regard to the measured position of eachof the respective plurality of die units. In accordance with embodimentsof the present invention UBM pad 119 is formed at the nominal, referenceposition 119′ without regard to the measured position of each of therespective plurality of die units. In the embodiment illustrated in FIG.5B, position of the actual positions of the UBM pad 119 and packageoutline 130 are the same as the corresponding nominal, referencepositions 108′, 130′. As illustrated, the actual position UBM via 116may also be in the position as the nominal, reference position 116′.

Adjusting the position of a unit detail pattern formed in the CSPbuild-up structure to align with the measured position of each die inthe panel may also include changing the RDL pattern design. In anembodiment, changing the RDL pattern design includes selecting abest-fit RDL pattern design from a discrete plurality of differentdesign options. An illustration of a discrete plurality of differentdesign options is provided in FIG. 6. For example, each quadrant I-IXrepresents a range of delta-values between the measured position of thebond pad 105 and the reference bond pad position 105′. By way ofexample, if the delta-value corresponds to point 140 in FIG. 6, then theRDL pattern design for quadrant VI is selected. If the delta-valuecorresponds to point 142 in FIG. 6, then the RDL pattern for quadrant IXis selected. In this manner the design tool can automatically generate agiven best-fit pattern for each individual die based upon thecorresponding delta-value for that specific die. For example each of thedifferent design patterns associated with the quadrants can havedifferent sizes, shapes, and/or orientations for the RDL pattern. WhileFIG. 6 illustrates a nine different design options, it is to beunderstood that any discrete number of different design options may beused.

In an embodiment, adjusting the position of a unit detail pattern formedin the CSP build-up structure to align with the measured position ofeach die in the panel includes changing the RDL pattern design with adynamic design approach. For example, a customized RDL pattern may bedynamically generated for each specific die unit based upon thecorresponding delta-values for each specific die unit.

In application, several variations are envisioned in accordance withembodiments of the present invention. For example, the manner ofadjusting a unit detail pattern formed in the CSP build-up structure maydepend upon the amount of adjustment required to align the unit detailpattern with the respective die in the panel. In a first leveloperation, where the delta-value is minimal, it is contemplated thatadjustment of the first via 112 position may be sufficient to compensatefor misalignment of the die 152. In a first variation, if the referencefirst via capture pad 118′ no longer sufficiently overlaps the adjustedfirst via 112 position, then all or a portion of the RDL pattern 114position may need to be adjusted by the same delta-value by which thefirst via 112 position was adjusted. In a second variation, whereadjustment of the RDL pattern 114 position is not adequate, the designof the RDL pattern 114 may be changed so that the first via capture pad118 is aligned to the first via 112, and the UBM via capture pad 120 isaligned with the UBM via 116. This may be accomplished by selecting abest-fit design of the RDL pattern 114 for each of the respective dieunits based upon the position of the delta-value in the quadrantsillustrated in FIG. 6, or dynamically designing a customized RDL pattern114 for each die unit.

As described above, an adaptive patterning technique in accordance withembodiments of the present invention may be utilized to pattern featureswithin a build-up structure 100, such as a first via 112 and RDL pattern114. In an embodiment, an adaptive patterning technique may be utilizedfor any structure within the build-up structure. For example, build-upstructure may contain multiple layers, vias, and RDL patterns. In anembodiment, an adaptive patterning technique may include measurement ofa first true position followed by adaptive patterning of a first via andRDL-1, then measurement of a second true position followed by adaptivepatterning of a via-2 and RDL-2, then measurement of true position ‘n’followed by adaptive patterning of a via-n and RDL-n.

In accordance with embodiments of the present invention, a lot of diepackages may be singulated from a panel or reticulated wafer. The lotmay be characterized by a unique statistical range of relativeorientations. In conventional processes, where a plurality of die aremisaligned across the panel, the statistical average across the lot forthe misalignment of the first via 112 relative to the respective die 152outline for the lot is directly proportional to the statistical averageof the misalignment of the die 152 relative to the package outline 130.These relationships can be represented as follows:

Δ_((avg,lot))(112,152)≈Δ_((avg,lot))(152,130)

In accordance with embodiments of the present invention, the first via112 may be adjusted for each individual die to compensate formisalignment of the respective die 152. Therefore, the statisticalaverage across the lot for the misalignment of the first via 112relative to the respective die 152 outline is considerably less than thestatistical average of the misalignment of the die 152 relative to thepackage outline 130. These relationships can be represented as follows:

Δ_((avg,lot))(112,152)<<Δ_((avg,lot))(152,130)

In an embodiment, the statistical average across the lot for themisalignment of the first via 112 relative to the respective die 152outline is nill.

Δ_((avg,lot))(112,152)=0

Certain embodiments may be implemented as a computer program productthat may include instructions stored on a non-transitorymachine-readable medium. These instructions may be used to program ageneral-purpose or special-purpose processor to perform the describedoperations. A machine-readable medium includes any mechanism for storingor transmitting information in a form (e.g., software, processingapplication) readable by a machine (e.g., a computer). Themachine-readable medium may include, but is not limited to, magneticstorage medium (e.g., floppy diskette); optical storage medium (e.g.,CD-ROM); magneto-optical storage medium; read-only memory (ROM);random-access memory (RAM); erasable programmable memory (e.g., EPROMand EEPROM); flash memory; or another type of medium suitable forstoring electronic instructions.

Additionally, some embodiments may be practiced in distributed computingenvironments where the machine-readable medium is stored on and/orexecuted by more than one computer system. In addition, the informationtransferred between computer systems may either be pulled or pushedacross the communication medium connecting the computer systems.

The digital processing devices described herein may include one or moregeneral-purpose processing devices such as a microprocessor or centralprocessing unit, a controller, or the like. Alternatively, the digitalprocessing device may include one or more special-purpose processingdevices such as a digital signal processor (DSP), an applicationspecific integrated circuit (ASIC), a field programmable gate array(FPGA), or the like. In an alternative embodiment, for example, thedigital processing device may be a network processor having multipleprocessors including a core unit and multiple microengines.Additionally, the digital processing device may include any combinationof general-purpose processing devices and special-purpose processingdevices.

Embodiments of the present invention may be performed with an adaptivepatterning system 700 as illustrated in FIG. 7. Operations may beperformed by hardware components, software, firmware, or a combinationthereof. Any of the signals provided over various buses 701 describedherein may be time multiplexed with other signals and provided over oneor more common buses. As illustrated, a panel or reticulated wafer 702may be supplied to an inspection tool 704 which measures a position of aplurality of device units on the panel and creates a file 706 containingthe measured position of each of the plurality of device units. Designsoftware stored on server 708 then creates a pattern design file 710 foreach of the plurality of device units based upon the measured positionof each of the plurality of device units. A patterning machine 712imports the pattern design and forms a patterned feature over each ofthe plurality of device units. The panel or reticulated wafer 702 isprovided to a patterning machine 712 from the inspection tool 704. Apatterned panel 714 may be output from the patterning machine 712.

In an embodiment, the design software further creates a new drawing forat least one layer of design, which is adjusted such that the first viaand/or RDL pattern is aligned to the measured position of each of theplurality of device units. In an embodiment, the software includes analgorithm for adaptive patterning. For example, the algorithm may adjustthe x-y position or orientation of a feature based upon a delta-value.In an embodiment, the algorithm may select a feature pattern from adiscrete number of design options based upon a delta-value. In anembodiment, the algorithm may dynamically design a feature based upon adelta-value.

The schematic illustration provided in FIG. 7 is indicative of the orderof a process in accordance with embodiments of the invention, however,it is not necessary that the actual equipment be arranged asillustrated. As illustrated, the design software is stored on a separateserver 708, which can also store a panel map which includes nominal,reference positions of the plurality of device units on the panel. It isnot required that the design software be stored on a separate server708. For example, design software could be stored on the inspection tool704 or patterning machine 712. It is possible to have all componentsintegrated into a single system.

Server 708 can be utilized to control any part of or the entire adaptivepatterning system 700. In an embodiment, server 708 includes memory 711having instructions stored thereon, which when executed by a processor709, cause the processor to instruct the inspection tool 704 to measurea position of each of a plurality of device units of a panel, create aunit-specific pattern for each of the respective plurality of deviceunits based upon the measured position for each of the respective deviceunits, and instruct the patterning tool 712 to form the unit-specificpatterns over each of the plurality of device units, wherein eachunit-specific pattern is aligned with the respective device unit. In anembodiment, creating a unit-specific pattern for each of the respectiveplurality of device units based upon the measured position for each ofthe respective device units may include adjusting an x-y position and/ororientation of at least one unit-specific pattern, selecting from adiscrete number of design options, or dynamically generating theunit-specific pattern.

In the foregoing specification, various embodiments of the inventionhave been described. It will, however, be evident that variousmodifications and changes may be made thereto without departing from thebroader spirit and scope of the invention as set forth in the appendedclaims. The specification and drawings are, accordingly, to be regardedin an illustrative sense rather than a restrictive sense.

1. An adaptive patterning method comprising: measuring a position ofeach of a plurality of device units of a panel; creating a unit-specificpattern for each of the respective plurality of device units based uponthe measured position for each of the respective device units; andforming the unit-specific patterns over each of the plurality of deviceunits, wherein each unit-specific pattern is aligned with the respectivedevice unit.
 2. The adaptive patterning method of claim 1, wherein theunit-specific pattern is selected from the group consisting of a firstvia pattern, a capture pad, and an interconnecting trace pattern.
 3. Theadaptive patterning method of claim 2, wherein the interconnecting tracepattern is a redistribution layer (RDL) pattern comprising a die viacapture pad, an underbump metallurgy (UBM) via capture pad, and aredistribution layer (RDL) pattern trace.
 4. The adaptive patterningmethod of claim 2, wherein each unit-specific pattern is a commonpattern aligned with the respective device unit.
 5. The adaptivepatterning method of claim 2, wherein each unit-specific pattern isuniquely created for each device unit.
 6. The adaptive patterning methodof claim 2, wherein the unit-specific pattern is formed over each of theplurality of device units with a mask-less patterning system.
 7. Theadaptive patterning method of claim 2, further comprising defining areference position of at least one feature on each of the plurality ofdevice units, wherein the measured position has a different x-y positionor orientation as compared to the reference position for the at leastone of the plurality of device units.
 8. The adaptive patterning methodof claim 7, further comprising defining a reference position of theunit-specific pattern over each the plurality of device units, whereinthe unit-specific pattern formed has a different x-y position ororientation as compared to the reference position of the unit-specificpattern for the at least one of the plurality of device units.
 9. Theadaptive patterning method of claim 8, wherein creating a unit-specificpattern for each of the plurality of device units based upon themeasured position for each of the respective device units comprises:calculating a delta-value between the measured position and thereference position for each of the respective plurality of device units;and adjusting a position of the unit-specific pattern by the samedelta-value from reference position of the unit-specific pattern for atleast one of the plurality of device units.
 10. The adaptive patterningmethod of claim 9, wherein the unit-specific pattern is a via, and theposition of the formed via has a different x-y position as compared tothe reference position of the via for the at least one of the pluralityof device units.
 11. The adaptive patterning method of claim 10, whereinthe unit-specific pattern is an RDL pattern, and the position of theformed RDL pattern has a different x-y position or orientation ascompared to the reference position of the RDL pattern for the at leastone of the plurality of device units.
 12. The adaptive patterning methodof claim 5, wherein the unit-specific pattern is an RDL pattern, and theposition of the formed RDL pattern has a different design than areference RDL pattern.
 13. The adaptive patterning method of claim 12,wherein the RDL pattern is selected from a discrete plurality ofdifferent design options or is dynamically generated.
 14. The adaptivepatterning method of claim 1, wherein the plurality of device units ofthe panel are arranged in a plurality of modules such that each moduleincludes at least two device units; wherein creating the unit-specificpattern for each of the respective device units comprises creating amodule-specific pattern for each of the respective plurality of deviceunits based upon the measured position for each of the respective deviceunits; and wherein forming the unit-specific patterns over each of theplurality of device units comprises forming the module-specific patternsover each of the plurality of device units, wherein each module-specificpattern is aligned with the respective at least two device units withinthe respective module.
 15. The adaptive patterning method of claim 1,further comprising: measuring a position of each of a plurality of othercomponents of the panel, the other components selected from the groupconsisting of optical elements, connectors and electronic components;wherein the plurality of device units of the panel are arranged in aplurality of modules such that each module includes at least one deviceunit and at least one other component; wherein creating theunit-specific pattern for each of the respective device units comprisescreating a module-specific pattern for each of the respective pluralityof device units and other components based upon the measured positionfor each of the respective device units and other components; andwherein forming the unit-specific patterns over each of the plurality ofdevice units comprises forming the module-specific patterns over each ofthe plurality of device units and other components, wherein eachmodule-specific pattern is aligned with the respective at least onedevice unit and at least one other component within the respectivemodule.
 16. A non-transitory computer-readable storage medium havinginstructions stored thereon, which, when executed by a processor, causethe processor to perform operations comprising: instructing aninspection tool to measure a position of each of a plurality of deviceunits of a panel; creating a unit-specific pattern for each of therespective plurality of device units based upon the measured positionfor each of the respective device units; and instructing a patterningtool to form the unit-specific patterns over each of the plurality ofdevice units, wherein each unit-specific pattern is aligned with therespective device unit.
 17. The non-transitory computer-readable storagemedium of claim 16, wherein creating a unit-specific pattern for each ofthe respective plurality of device units based upon the measuredposition for each of the respective device units comprises an operationselected from the group consisting of: adjusting an x-y position of atleast one unit-specific pattern, adjusting a rotation of at least oneunit-specific pattern, selecting from a discrete number of designoptions, and dynamically generating the unit-specific pattern.
 18. Anadaptive patterning system comprising: an inspection tool to measure aposition of a plurality of device units on a panel, and create a filecontaining the measured position of each of the plurality of deviceunits; design software that creates a unit-specific pattern design foreach of the plurality of device units based upon the measured positionof each of the plurality of device units; and a patterning machine toimport the unit-specific pattern design and form a patterned featureover each of the plurality of device units.
 19. The adaptive patterningsystem of claim 18, wherein the design software adjusts the x-y positionor rotation of the patterned feature.
 20. The adaptive patterning systemof claim 18, wherein the design software creates a unit-specific patterndesign by selecting from a discrete number of design options ordynamically generating the unit-specific pattern.